A local damage of Diamond-Like Carbon
(DLC) is repaired by recoating. Conventional recoating
regains through the following processes: (1)
Uninstallation of the die from a processing machine, (2)
Removal of all the DLC, (3) Recoating of new DLC, (4)
Installation of the recoated die to a processing machine.
In this work, and thus we propose a new way of repairing
such a local damage of DLC without uninstallation of die.
We carried out friction test of Si-DLC with a local
scratched damage before and after repairing deposition
by PECVD, and the repaired Si-DLC showed better
friction characteristics than damaged Si-DLC.