TypeConference
Titleriction property of Si-DLC with a local scratched damage before and after repairing deposition
SourceAsiatrib-2018, pp. 176-177
AuthorH. Takamatasu, I. Tanaka, H. Kousaka, T. Furuki

Abstract

 A local damage of Diamond-Like Carbon (DLC) is repaired by recoating. Conventional recoating regains through the following processes: (1) Uninstallation of the die from a processing machine, (2) Removal of all the DLC, (3) Recoating of new DLC, (4) Installation of the recoated die to a processing machine. In this work, and thus we propose a new way of repairing such a local damage of DLC without uninstallation of die. We carried out friction test of Si-DLC with a local scratched damage before and after repairing deposition by PECVD, and the repaired Si-DLC showed better friction characteristics than damaged Si-DLC. 


Content

Asiatrib-2018, pp. 176-177