TitleDiamond like carbon deposition process optimization for media disk corrosion performance
SourceMITC2015-pp 255-256
AuthorW.S. Khoo, R. Md. Nasir, M.R. Zaidi, W.L. Ng


Carbon thickness reduction activity is important to reduce the magnetic spacing in hard disk drive. However, thinner carbon overcoat thickness is susceptible to galvanic corrosion from the magnetic underlayer. Process optimization of the deposition chamber is important to obtain an overcoat carbon thickness with good corrosion resistance. The corrosion performance relationship between different process parameter was investigated.


MITC2015-pp 255-256