TitleRecent advances in non-contact metrology, high speed measurement, steep slope measurement and correlation with stylus data
SourceMITC2015-pp 314-315
Author M. Conroy, R. Burton, Y. Yu, T. Kumagi


High speed, large sample analysis of optics and steep sided rough surfaces are all areas of increasing interest in both research and production environments. New designs of components and materials are finding new applications in the microelectronics, optics and automotive industries and their metrology is becoming increasingly important. The paper will cover details of the challenges the above measurements and also some possible solutions.


MITC2015-pp 314-315