| Type | Conference |
|---|---|
| Title | Recent advances in non-contact metrology, high speed measurement, steep slope measurement and correlation with stylus data |
| Source | MITC2015-pp 314-315 |
| Author | M. Conroy, R. Burton, Y. Yu, T. Kumagi |
High speed, large sample analysis of
optics and steep sided rough surfaces are all areas of
increasing interest in both research and production
environments. New designs of components and materials
are finding new applications in the microelectronics,
optics and automotive industries and their metrology is
becoming increasingly important. The paper will cover
details of the challenges the above measurements and
also some possible solutions.